PH3

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A colorless, poisonous, fishy smell gas. The gas may form an explosive mixture with air and autoignition, producing white smoke phosphorus pentoxide which can cause serious respiratory tract irritation after inhalation. Can be applied to semiconductor -Oxidation/Diffusion/Epitaxy/CVD/Implant/Etching、LED-epitaxy process.

Description

Product Specification
PURITY PACKAGE VALVE CONTENT
PH3 6N 44L DISS632 15