Description
| Product | Specification | |||
| PURITY | PACKAGE | VALVE | CONTENT | |
| SiH4 | 6N | 47L | DISS632 | 12 |
| 6N | Y(440L) | DISS632 | 125 | |
SiH4
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At room temperature, silane (SiH4) is flammable gas. It can ignite spontaneously without external fire sources in the air. When it exceeds 420°C, it can be decomposed into silicon and hydrogen, so it can be used in CVD to obtain silicon. It is an important special electronic gas in semiconductor industry.
