SiH4

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At room temperature, silane is flammable gas,it can self-ignited without external fire source in the air. When more than 420°C, it can be decomposed into silicon and hydrogen, so it can be used in CVD to get the silicon. It is an important special electronic gas in semiconductor industry.

Description

Product Specification
PURITY PACKAGE VALVE CONTENT
SiH4 6N 47L DISS632 12
6N Y(440L) DISS632 125